HOME > 論文 > 書誌詳細Identification and roles of nonstoichiometric oxygen in amorphous Ta2O5 thin films deposited by electron beam and sputtering processesCedric Mannequin, Tohru Tsuruoka, Tsuyoshi Hasegawa, Masakazu Aono. Applied Surface Science 385 426-435. 2016.https://doi.org/10.1016/j.apsusc.2016.04.099 NIMS著者鶴岡 徹青野 正和Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-10-26 15:39:12 +0900更新時刻: 2025-03-10 04:14:04 +0900
