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Identification and roles of nonstoichiometric oxygen in amorphous Ta2O5 thin films deposited by electron beam and sputtering processes

Cedric Mannequin, Tohru Tsuruoka, Tsuyoshi Hasegawa, Masakazu Aono.
Applied Surface Science 385 426-435. 2016.
https://doi.org/10.1016/j.apsusc.2016.04.099

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