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Combinatorial Investigation of ZrO2-Based Dielectric Materials for Dynamic Random-Access Memory Capacitors
(Combinatorial Investigation of ZrO2-Based Dielectric Materials for Dynamic Random-Access Memory Capacitors)

Yuji Kiyota, Kenji Itaka, Yuta Iwashita, Tetsuya Adachi, Toyohiro Chikyow, Atsushi Ogura.
Japanese Journal of Applied Physics 50 [6] 06GH12. 2011.
https://doi.org/10.1143/jjap.50.06gh12

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