Microstructure of SiC Thin Films Produced on Graphite by Excimer-laser Chemical Vapor Deposition.
(エキシマレーザーCVDによりグラファイト上に作成したSiC薄膜の微構造.)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:34:40 +0900 Updated at: 2026-09-28 04:46:42 +0900