HOME > 論文 > 書誌詳細Plasma resistance of Y2O3 nanofilms on quartz with different interlayer deposited by EB-PVDDae-Min KIM, Sung-Min LEE, In-Ki KIM, JANG, Byungkoog, Dae-Soon LIM, Yoon-Suk OH. JOURNAL OF THE CERAMIC SOCIETY OF JAPAN 120 [11] 539-543. 2012.NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 16:50:41 +0900更新時刻: 2018-12-15 01:11:36 +0900
