HOME > Article > DetailPlasma resistance of Y2O3 nanofilms on quartz with different interlayer deposited by EB-PVDDae-Min KIM, Sung-Min LEE, In-Ki KIM, JANG, Byungkoog, Dae-Soon LIM, Yoon-Suk OH. JOURNAL OF THE CERAMIC SOCIETY OF JAPAN 120 [11] 539-543. 2012.NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 16:50:41 +0900Updated at: 2018-12-15 01:11:36 +0900
