Si探針による高分解能観察が可能なAFM超微小押し込み試験機の開発
(Development of an AFM Ultra-Micro Hardness Tester with a Si tip for High-Resolution Imaging)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:47:14 +0900 Updated at: 2018-12-14 23:08:27 +0900