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A system for measuring the adhesion forces of micro-objects in a scanning electron microscope
(走査電子顕微鏡下での微小物体の付着力測定システム)

Author(s)Hideki T. Miyazaki, 新谷紀雄, Yasushi Tomizawa, Koichi Koyama, Tomomasa Sato, Yasushi Tomizawa, Koichi Koyano, Tomomasa Sato, Norio Shinya.
Journal titleReview of Scientific Instruments 71 [8] 3123-3131
ISSN: 00346748, 10897623
ESI category: CHEMISTRY
Publisher
Year of publication2000
LanguageEnglish
DOIhttps://doi.org/10.1063/1.1305812
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