SAMURAI - NIMS Researchers Database

HOME > 論文 > 書誌詳細

Electrical properties of anatase TiO2 films by atomic layer deposition and low annealing temperature
(Electrical properties of anatase TiO2 films by atomic layer deposition and low annealing temperature)

Toshihide Nabatame, Akihiko Ohi, Toyohiro Chikyo, Masayuki Kimura, Hiroyuki Yamada, Tomoji Ohishi.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 32 [3] 03D121. 2014.
https://doi.org/10.1116/1.4869059

NIMS著者

    Materials Data Repository (MDR)上の本文・データセット

      作成時刻: 2016-05-24 17:13:53 +0900更新時刻: 2024-03-31 11:47:18 +0900

      ▲ページトップへ移動