HOME > 論文 > 書誌詳細Solid-source doping by using phosphosilicate glass into p-type bulk Si (100) substrate: Role of the capping SiO2 barrierYoshiaki Kikuchi, Antony Peter, Bartlomiej Jan Pawlak, An De Keersgieter, Pierre Eyben, Naoto Horiguchi, Anda Mocuta. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 36 [6] 061205. 2018.https://doi.org/10.1116/1.5053455 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2026-09-01 18:18:40 +0900 更新時刻: 2026-10-03 07:10:03 +0900
