Micro-object Pick and Place Operation under SEM based on Micro-physics
(微小体物理学に基づいた走査電顕下での微小物体操作)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:46:51 +0900Updated at: 2024-04-01 18:04:15 +0900