Reduction in resistivity of 50 nm wide Cu wire by high heating rate and short time annealing utilizing misorientation energy | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Reduction in resistivity of 50 nm wide Cu wire by high heating rate and short time annealing utilizing misorientation energy
(Reduction in resistivity of 50 nm wide Cu wire by high heating rate)

Jin Onuki, Khyoupin Khoo, Yasushi Sasajima, Yasunori Chonan, Takashi Kimura.

Journal of Applied Physics 108 [4] 044302. 2010.

https://doi.org/10.1063/1.3474663

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作成時刻: 2016-05-24 16:24:25 +0900 更新時刻: 2026-10-30 07:58:09 +0900

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