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Reduction in resistivity of 50 nm wide Cu wire by high heating rate and short time annealing utilizing misorientation energy
(Reduction in resistivity of 50 nm wide Cu wire by high heating rate)

Jin Onuki, Khyoupin Khoo, Yasushi Sasajima, Yasunori Chonan, Takashi Kimura.

Journal of Applied Physics 108 [4] 044302. 2010.

https://doi.org/10.1063/1.3474663

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 16:24:25 +0900 Updated at: 2026-10-30 07:58:09 +0900

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