HOME > Article > DetailDamage-free LED lithography for atomically thin 2D material devicesYue Shi, Takaaki Taniguchi, Ki-Nam Byun, Daiki Kurimoto, Eisuke Yamamoto, Makoto Kobayashi, Kazuhito Tsukagoshi, Minoru Osada. Scientific Reports 13 [1] 2583. 2023.https://doi.org/10.1038/s41598-023-29281-w Open Access Springer Science and Business Media LLC (Publisher) NIMS author(s)TANIGUCHI, TakaakiTSUKAGOSHI, KazuhitoOSADA, MinoruFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2023-02-28 03:37:06 +0900Updated at: 2024-05-01 08:42:30 +0900
