HOME > 論文 > 書誌詳細Influence of Atomic Hydrogen on the Growth Reactions of Amorphous Boron Films in a Low Pressure B2H6+He+H2 plasma小松正二郎, 守吉佑介. Journal of Applied Physics 1878. 1988.NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 10:29:38 +0900 更新時刻: 2022-09-05 10:29:38 +0900
