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Influence of Atomic Hydrogen on the Growth Reactions of Amorphous Boron Films in a Low Pressure B2H6+He+H2 plasma

小松正二郎, 守吉佑介.

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      Created at: 2022-09-05 10:29:38 +0900 Updated at: 2022-09-05 10:29:38 +0900

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