HOME > 論文 > 書誌詳細Nano-fabrication using electron-beam-induced deposition combined with low energy ion milling(EBIDとイオンによるナノ構造作成)MITSUISHI, Kazutaka, SHIMOJO, Masayuki, TANAKA, Miyoko, FURUYA, Kazuo. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 244-246. 2006.NIMS著者三石 和貴田中 美代子Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-10-21 22:02:52 +0900 更新時刻: 2022-10-21 22:02:52 +0900
