Effects of surface hydrogenation to purify and flatten Si surfaces by extracting metallic impurities in subsurfaces
(Si表面の水素化による表面下の金属不純物の析出を利用したSi表面の純化および平坦化効果)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:42:38 +0900 Updated at: 2026-10-01 05:09:52 +0900