スパッタ蒸着したチタン薄膜の室温における酸化
(Room Temperature Oxidation of Spatter-Deposited Ti Films)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:28:32 +0900Updated at: 2018-12-14 22:14:26 +0900