Microstructure and Growth of SiC Film by Excimer Laser Chemical Vapour Deposition at Low Temperatures.
(エキシマレーザCVDによるSiC膜の低温成長と構造.)
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Created at: 2016-05-24 11:34:05 +0900Updated at: 2018-12-15 00:41:59 +0900