HOME > Article > DetailMicrostructure fabrication of GaAs by low energy focused ion beam(低エネルギー集束イオンビームによるGaAs微細構造の作製)CHIKYO, Toyohiro, KOGUCHI, Nobuyuki. Journal of Vacuum Science and Technology . .NIMS author(s)CHIKYO, ToyohiroFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-11-15 00:39:18 +0900Updated at: 2022-11-15 00:39:18 +0900