Double-Side-Coated Nanomechanical Membrane-Type Surface Stress Sensor (MSS) for One-Chip–One-Channel Setup
Genki Yoshikawa, Frederic Loizeau, Cory J. Y. Lee, Terunobu Akiyama, Kota Shiba, Sebastian Gautsch, Tomonobu Nakayama, Peter Vettiger, Nico F. de Rooij, Masakazu Aono.
