Double-Side-Coated Nanomechanical Membrane-Type Surface Stress Sensor (MSS) for One-Chip–One-Channel Setup
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at :2016-05-24 17:15:31 +0900 Updated at :2020-11-16 22:34:31 +0900