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Double-Side-Coated Nanomechanical Membrane-Type Surface Stress Sensor (MSS) for One-Chip–One-Channel Setup

Genki Yoshikawa, Frederic Loizeau, Cory J. Y. Lee, Terunobu Akiyama, Kota Shiba, Sebastian Gautsch, Tomonobu Nakayama, Peter Vettiger, Nico F. de Rooij, Masakazu Aono.
Langmuir 29 [24] 7551-7556. 2013.

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      Created at :2016-05-24 17:15:31 +0900 Updated at :2020-11-16 22:34:31 +0900

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