Investigation on anti-reflection property of a-C:H:N thin films prepared by rf magnetron sputtering
(水素・窒素混入アモルファスカーボンフィルムの無反射特性評価)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:06:56 +0900 Updated at: 2022-09-05 11:06:56 +0900