Planar Metal–Oxide–Semiconductor Field-Effect Transistors with Raised Source and Drain Extensions Fabricated by In situ Boron-Doped Selective Silicon Epitaxy
NIMS著者
Materials Data Repository (MDR)上の本文・データセット
作成時刻: 2026-09-01 18:18:53 +0900 更新時刻: 2026-11-04 07:11:49 +0900
