HOME > Article > DetailPreparation of orthorhombic Y-doped TaON filmTakanori Mimura, Takao Shimizu, Hiroshi Funakubo. Journal of the Ceramic Society of Japan 130 [7] 22002. 2022.https://doi.org/10.2109/jcersj2.22002 Open Access Ceramic Society of Japan (Publisher) NIMS author(s)SHIMIZU, TakaoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-12-13 03:27:09 +0900Updated at: 2024-04-02 05:37:25 +0900
