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micro-XPS analysis of TiN with/without Cl implantation
(TiN膜へのClイオン打ち込み効果のXPSによる研究)

M. Yoshitake, A. Thananan, T. Aizawaki, K. Yoshihara.
Surface and Interface Analysis 34 [1] 698-702. 2002.
https://doi.org/10.1002/sia.1391

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