HOME > 論文 > 書誌詳細Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors(薄膜の実効的ヤング率測定手法)Akiko N. Itakura, Masaya Toda, Koji Miyake, Renate Förch, Rüdiger Berger. Japanese Journal of Applied Physics 52 [11R] 110111. 2013.https://doi.org/10.7567/jjap.52.110111 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 17:04:18 +0900更新時刻: 2024-03-31 13:17:10 +0900
