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Effects of Coating Materials on Two Dimensional Stress-Induced Deflection of Nanomechanical Sensors

Genki Yoshikawa, Cory J. Y. Lee, Kota Shiba.

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    Fulltext and dataset(s) on Materials Data Repository (MDR)


      Created at: 2016-05-24 17:41:13 +0900 Updated at: 2026-10-08 06:27:33 +0900

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