HOME > Article > DetailEffects of Coating Materials on Two Dimensional Stress-Induced Deflection of Nanomechanical SensorsGenki Yoshikawa, Cory J. Y. Lee, Kota Shiba. Journal of Nanoscience and Nanotechnology 14 [4] 2908-2912. 2014.https://doi.org/10.1166/jnn.2014.8604 NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 17:41:13 +0900Updated at: 2024-04-02 04:43:23 +0900