HOME > Article > DetailGROWTH AND PROPERTIES OF ZNO FILMS GROWN(DMZnとN2Oガスを用いたプラズマアシストMOCVD法によるZnO薄膜成長と評価)Takayuki Nakano, Nishimoto Kazuki, SUMIYA, Masatomo, Shunro Fuke. JOURNAL OF AUTOMATION, MOBILE ROBOTICS & INTELLIGENT SYSTEMS 3 [4] 124-126. 2009.NIMS author(s)SUMIYA, MasatomoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 16:00:37 +0900Updated at: 2018-12-15 00:08:40 +0900