HOME > Article > DetailSystematic study of FIB-induced damage for the high-quality TEM sample preparationJun Uzuhashi, Tadakatsu Ohkubo. Ultramicroscopy 262 113980. 2024.https://doi.org/10.1016/j.ultramic.2024.113980 Open Access Materials Data Repository (MDR) NIMS author(s)UZUHASHI, JunOHKUBO, TadakatsuFulltext and dataset(s) on Materials Data Repository (MDR)MDRavailable Systematic study of FIB-induced damage for the high-quality TEM sample preparation Created at: 2024-05-08 03:12:52 +0900 Updated at: 2026-10-08 09:03:55 +0900