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Characterization of defect structure in zinc oxide films doped with impurity
(不純物添加した酸化亜鉛基薄膜の欠陥構造の評価)

RYOKEN, Haruki, SAKAGUCHI, Isao, OGAKI, Takeshi, ADACHI, Yutaka, OHASHI, Naoki, HANEDA, Hajime.
KEY ENGINEERING MATERIALS 75-78. 2006.

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    Created at: 2022-10-21 22:03:11 +0900 Updated at: 2022-10-21 22:03:11 +0900

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