HOME > 論文 > 書誌詳細Fabrication of transmission mask by anisotropic wet etching and focused ion beam techniqueH-Y.Sheng, FUJITA, Daisuke, 大木泰造, 岡本洋, 根城均. Japanese journal of Applied Physics . 1997.NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 10:49:15 +0900 更新時刻: 2022-09-05 10:49:15 +0900
