HOME > 論文 > 書誌詳細Resolving lateral and vertical structures by ellipsometry using wavelength range scanP. Petrik, E. Agocs, J. Volk, I. Lukacs, B. Fodor, P. Kozma, T. Lohner, S. Oh, Y. Wakayama, T. Nagata, M. Fried. Thin Solid Films 571 579-583. 2014.https://doi.org/10.1016/j.tsf.2014.02.008 NIMS著者若山 裕長田 貴弘Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 17:40:46 +0900 更新時刻: 2025-06-14 06:49:10 +0900