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Control of Competing Thermodynamics and Kinetics in Vapor Phase Thin-Film Growth of Nitrides and Borides

Isao Ohkubo, Takashi Aizawa, Katsumitsu Nakamura, Takao Mori.
Frontiers in Chemistry 9 . 2021.
https://doi.org/10.3389/fchem.2021.642388
Open Access Frontiers Media SA (Publisher)

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    Created at: 2021-08-06 03:00:21 +0900Updated at: 2024-03-31 12:05:07 +0900

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