Synthesis of c-BN films by using a low-pressure inductively coupled BF3-He-N2-H2 plasma
(低圧誘導結合プラズマによるBF3-He-N2-H2 ガスからの立方晶窒化ホウ素膜合成)
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Created at: 2016-05-24 15:01:47 +0900 Updated at: 2026-11-04 06:40:20 +0900