HOME > Article > DetailApplication of Cr Kα X-ray photoelectron spectroscopy system to overlayer thickness determinationMasaaki Kobata, Igor Píš, Hiroshi Nohira, Hideo Iwai, Keisuke Kobayashi. Surface and Interface Analysis 43 [13] 1632-1635. 2011.https://doi.org/10.1002/sia.3760 NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 16:19:25 +0900Updated at: 2024-03-31 14:58:44 +0900