HOME > 論文 > 書誌詳細Quantitative evaluation of surface damage on SiO2/Si specimen caused by electron beam irradiationS. Tanuma, T. Kimura, K. Nishida, S. Hashimoto, M. Inoue, T. Ogiwara, M. Suzuki, K. Miura. Applied Surface Science 241 [1-2] 122-126. 2005.https://doi.org/10.1016/j.apsusc.2004.09.028 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 14:42:21 +0900 更新時刻: 2026-10-01 04:40:37 +0900
