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cBN Synthesis by arc jet CVD and microwave PCVD from BF3 gas
(アークCVDおよびマイクロ波プラズマCVDによるBF3ガスからのBN合成)

MATSUMOTO, Seiichiro, Zhang Wenjun, JIE, YU.

NIMS author(s)


    Fulltext and dataset(s) on Materials Data Repository (MDR)


      Created at: 2017-02-27 00:04:05 +0900 Updated at: 2017-03-17 02:08:49 +0900

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