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Coordination analysis of dielectric thin film for semiconductor devices using spatially-resolved EELS

KIMOTO, Koji, MATSUI, Yoshio, 生田目, 安田, 溝口, 田中功, 鳥海.

Proceedings for 8th APEM 124-125. 2004.

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Created at: 2017-02-27 00:32:47 +0900Updated at: 2017-03-17 02:34:37 +0900

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