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集束イオンビーム(FIB)を用いたTEM試料その場作製・評価装置の製作.
(Development of In-Sitn TEM Specimen Preparation Device using FIB System.)
日本電子顕微鏡学会. May 26, 1993-May 28, 1993.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 00:38:58 +0900 Updated at: 2017-07-10 17:21:56 +0900