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ピエゾ抵抗カンチレバーセンサーの構造最適化による超高感度膜型表面応力センサー（MSS）とその応用
(Optimization of piezoresistive cantilever sensors towards highly sensitive membrane-type surface stress sensor (MSS) and its applications)
The Japan Society of Applied Physics, The 72nd Fall Meeting. August 29, 2011-September 02, 2011.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 04:27:31 +0900 Updated at: 2017-07-10 21:10:32 +0900