HOME > Presentation > Detail
(Synthesis and characterization of cubic boron nitride thin films by inductively coupled radio frequency plasma CVD)
14 th International Symposium on Plasma Chemistry. August 02, 1999-August 06, 1999.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 01:42:15 +0900 Updated at: 2018-05-30 18:27:25 +0900