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Cl+ｲｵﾝ注入の有無によるTiN膜の潤滑性と微小領域XPS測定
(Micro-XPS analysis of slide-tested TiN film with/without Cl+ implantation)
ECASIA01. September 30, 2001-October 05, 2001.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-01-08 03:23:31 +0900 Updated at: 2017-07-10 18:15:05 +0900