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シリコン表面の酸化に関する量子化学的検討
(Quantum chemical study on the silicon surface oxidation)
応用物理学会学術講演会. October 02, 1997-October 04, 1997.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 01:21:23 +0900 Updated at: 2017-07-10 17:45:05 +0900