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マグネトロンスパッタ法によるＭｏ基板上のＳｉＣ被覆の熱安定性におよぼすＣおよびＡｌ２Ｏ３添加の影響
(Effects of Addition of C or Al2O3 on Thermal Stability of SiC Coatings Deposited on Mo Substrate by Magnetron Sp)
日本金属学会. 1984-04-03.
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 00:06:50 +0900 Updated at: 2017-07-10 17:02:40 +0900