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シリコン酸化膜における応力特性の計算化学的検討
(Theoretical Studies of Stress Properities of Silicon Oxide Layer)
応用物理学会. March 28, 1999-March 31, 1999.
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Created at: 2017-02-18 01:40:43 +0900 Updated at: 2017-07-10 17:55:12 +0900