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集束イオンビームをインタフェイスした微細加工In-Situ観察用走査透過型電子顕微鏡の製作.
(Development of In-Situ TEM Interfaced with Focused Ion Beam for Microlithography.)
応用物理学会. September 16, 1992-September 19, 1970.
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2017-02-18 00:28:23 +0900 Updated at: 2017-07-10 17:15:26 +0900