Effect of material selection on bonding interface for direct wafer bonding processing of epitaxial magnetoresistive devices |

Effect of material selection on bonding interface for direct wafer bonding processing of epitaxial magnetoresistive devices

著者	チンカミン, 桜庭裕弥, 宝野和博.
会議名	The 3rd ImPACT International Symposium
発表年	2017
言語	Japanese